Abatement System for PECVD
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| Type: | Buy-It-Now |
| Location: | Greece |
| Category: | Further Equipment |
| Manufacturer: | Edwards |
| Model: | TCS Y070-A4-034 |
| Year of Make: | 2007 |
| Description: | Description Neutrilizes all the gases produced by the AR coating proccess |Year 2007 |Manufacturer Boc Edwards |Model TCS Y070-A4-034 |Power 4kva 230V/1 |Chilled Water(Min Flow) 4m3/hr |Chilled Water(Pressure) 4.1-6.9bar |Chilled Water(Heat Load) 25kw |Chilled Water(Temp) 18deg C |Clean Dry Air (CDA) |DI Water(Pressure) 1.5-4.0bar |DI Water(Max Flow Rate) 0.48m3/hr |Process Gases(Nitrogen) 0.9m3/hr |Process Gases(LPG) 0.9m3/hr |Bld’g Exaust 160m3/hr |Extras Bld’g Drain |
| Technical Specifications: | Length x width x height: - × - × - Weight: - State: good At local norms: --------- |